JPH0453058U - - Google Patents
Info
- Publication number
- JPH0453058U JPH0453058U JP9354990U JP9354990U JPH0453058U JP H0453058 U JPH0453058 U JP H0453058U JP 9354990 U JP9354990 U JP 9354990U JP 9354990 U JP9354990 U JP 9354990U JP H0453058 U JPH0453058 U JP H0453058U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- chamber
- differential
- connecting portion
- pumping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005086 pumping Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9354990U JPH0453058U (en]) | 1990-09-07 | 1990-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9354990U JPH0453058U (en]) | 1990-09-07 | 1990-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453058U true JPH0453058U (en]) | 1992-05-06 |
Family
ID=31830855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9354990U Pending JPH0453058U (en]) | 1990-09-07 | 1990-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453058U (en]) |
-
1990
- 1990-09-07 JP JP9354990U patent/JPH0453058U/ja active Pending